Effect of induction coil position on aerosol deposition assisted by supersonic inductively coupled plasma jet

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Bachelor of Engineering Mitsuki Ampo, Graduate School of Science and Technology, University of Tsukuba; Bachelor of Engineering Sangmin Shin, s2520920@u.tsukuba.ac.jp, Graduate School of Science and Technology, University of Tsukuba; Master of Engineering Yuki Akedo, s2330195@u.tsukuba.ac.jp, Graduate School of Science and Technology, University of Tsukuba; Ph.D. Takayasu Fujino, tfujino@kz.tsukuba.ac.jp, Institute of Systems and Information Engineering, University of Tsukuba;

Plasma-assisted aerosol deposition generally employs a radio-frequency inductively coupled, thermally nonequilibrium plasma jet, in which the electron temperature exceeds the heavy-particle temperature, to enhance the film deposition efficiency of aerosol deposition. This study examines, using magnetohydrodynamic numerical simulation, whether placing a radio-frequency induction coil in the subsonic section or in the supersonic section of a convergent-divergent nozzle is more effective for exposing flying particles to a plasma jet with higher electron temperature and electron number density. Numerical results indicate that winding the induction coil around the supersonic section of the nozzle is more effective in exposing flying particles to a plasma jet with a higher electron number density than the placement of the coil in the subsonic section. The electron number density of the plasma jet exhausted from the nozzle reaches a value approximately one order of magnitude larger in the supersonic-section coil configuration. Although the peak electron temperature inside the nozzle becomes higher by several thousand K in this case, no practically significant difference in the electron temperature of the plasma jet exhausted from the nozzle is observed between the two coil placement cases.

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March 2026

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